Patent Assignment
Reel/Frame 048798/0106
Assignment of Assignor's Interest
Recorded: 2019-04-04
Pages: 5
Assignors
OSHEMKOV, SERGEY
Executed: 2016-06-21
KRUGLYAKOV, VLADIMIR
Executed: 2016-06-21
BLUMRICH, FREDERIK
Executed: 2016-06-23
PERETS, YUVAL
Executed: 2016-06-21
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Critical Dimension Variation Correction in Extreme Ultraviolet Lithography