Patent Assignment
Reel/Frame 048829/0753
Assignment of Assignor's Interest
Recorded: 2018-12-19
Pages: 7
Assignor
COMMISSARIAT A L'ENERGIE ATOMIQUE (CEA)
Executed: 2017-03-01
Assignees
RI RESEARCH INSTRUMENTS GMBH
FRIEDRICH-EBERT-STRASSE 1, BERGISCH-GLADBACH, 51429, GERMANY
USHIO DENKI KABUSHIKI KAISHA
2-6-1 OTEMACHI, CHIYODA-KU, TOKYO, 100-8150, JAPAN
Covered Property
(1)
Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 5, 2012
From: AIXUV GMBH
To: BRUKER ADVANCED SUPERCON GMBH
Reel/Frame 028318/0671 →
Assignment of Assignor's Interest
Jan 17, 2014
From: XTREME TECHNOLOGIES GMBH
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 032086/0615 →
Assignment of Assignor's Interest
Jun 5, 2015
From: BRUKER ADVANCED SUPERCONGMBH
To: RI RESEARCH INSTRUMENTS GMBH
Reel/Frame 035793/0380 →