Patent Assignment
Reel/Frame 048861/0289
Assignment of Assignor's Interest
Recorded: 2019-04-11
Pages: 3
Assignors
YUZE, TAKUMI
Executed: 2018-12-04
TERASAWA, TOSHIHIRO
Executed: 2018-12-04
SASAKI, NARUYASU
Executed: 2018-12-04
Assignee
ULVAC, INC.
2500, HAGISONO, CHIGASAKI-SHI, KANAGAWA, 253-8543, JAPAN
Covered Property
(1)
Ion Source and Ion Implantation Apparatus