Patent Assignment
Reel/Frame 048871/0873
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 14
Assignors
SUN, XINGHUA
Executed: 2017-08-11
YAMAMURA, TAKASHI
Executed: 2017-08-10
NAGAI, HIROYUKI
Executed: 2017-08-18
ASAKO, RYUICHI
Executed: 2017-08-10
LUTKER-LEE, KATIE MARIE
Executed: 2017-08-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Manufacturing Methods to Protect Ulk Materials from Damage During Etch Processing to Obtain Desired Features