Patent Assignment
Reel/Frame 048875/0043
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 3
Assignor
LANE, BARTON
Executed: 2019-04-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Methods for Vhf Plasma Processing