Patent Assignment
Reel/Frame 048893/0949
Assignment of Assignor's Interest
Recorded: 2019-04-16
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Silicon Nitride Layers for the Manufacture of Microelectronic Workpieces