Patent Assignment
Reel/Frame 048954/0362
Assignment of Assignor's Interest
Recorded: 2019-04-22
Pages: 5
Assignors
WU, CHENG-KUAN
Executed: 2019-04-18
CHENG, PO-CHUNG
Executed: 2018-06-26
CHEN, LI-JUI
Executed: 2018-06-26
SHIH, CHIH-TSUNG
Executed: 2018-06-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method and Apparatus for Lithography in Semiconductor Fabrication