Patent Assignment
Reel/Frame 048969/0508
Assignment of Assignor's Interest
Recorded: 2019-04-23
Pages: 4
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Determining an Optimized Set of Measurement Locations for Measurement of a Parameter of a Lithographic Process, Metrology System and Computer Program Products for Implementing Such Methods