Patent Assignment
Reel/Frame 048986/0488
Assignment of Assignor's Interest
Recorded: 2019-04-24
Pages: 3
Assignor
LIU, WEN-KUEI
Executed: 2019-04-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Slurry Recycling for Chemical Mechanical Polishing System