Patent Assignment
Reel/Frame 048995/0726
Assignment of Assignor's Interest
Recorded: 2019-04-25
Pages: 5
Assignor
TANIKAWA, TAKEHIRO
Executed: 2019-04-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus