Patent Assignment
Reel/Frame 049013/0930
Assignment of Assignor's Interest
Recorded: 2019-04-26
Pages: 3
Assignor
FUNABASHI, NAOKI
Executed: 2019-02-14
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Pattern Forming Apparatus, Alignment Mark Detection Method, and Pattern Forming Method