Patent Assignment
Reel/Frame 049016/0632
Assignment of Assignor's Interest
Recorded: 2019-04-29
Pages: 2
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Microwave Output Device and Plasma Processing Apparatus