Patent Assignment
Reel/Frame 049052/0198
Assignment of Assignor's Interest
Recorded: 2019-05-01
Pages: 4
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO,, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Minimizing Errors of Optical Proximity Correction in Semiconductor Pattern and Device for Performing the Same