Patent Assignment
Reel/Frame 049055/0076
Assignment of Assignor's Interest
Recorded: 2019-05-01
Pages: 2
Assignors
TENG, YUN CHEN
Executed: 2019-04-16
YU, DE-WEI
Executed: 2019-04-16
CHEN, CHIEN-HAO
Executed: 2019-04-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
A Method for Forming a Finfet Structure That Prevents or Reduces Deformation of Adjacent Fins