Patent Assignment
Reel/Frame 049060/0393
Assignment of Assignor's Interest
Recorded: 2019-05-02
Pages: 3
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Charged-Particle Beam Writing Apparatus and Charged-Particle Beam Writing Method