Patent Assignment
Reel/Frame 049070/0642
Assignment of Assignor's Interest
Recorded: 2019-05-03
Pages: 3
Assignor
HAYASHI, DAISUKE
Executed: 2019-04-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Stage and Plasma Processing Apparatus