Patent Assignment
Reel/Frame 049090/0022
Assignment of Assignor's Interest
Recorded: 2019-05-06
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Atomic Layer Etching of Oxide