Patent Assignment
Reel/Frame 049109/0876
Assignment of Assignor's Interest
Recorded: 2019-05-08
Pages: 3
Assignors
TSIATMAS, ANAGNOSTIS
Executed: 2016-11-15
VERMA, ALOK
Executed: 2016-11-15
VERSTRAETEN, BERT
Executed: 2016-11-15
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of a Device Manufacturing Process, Metrology Apparatus, Substrate, Target, Device Manufacturing System, and Device Manufacturing Method