Patent Assignment
Reel/Frame 049120/0409
Assignment of Assignor's Interest
Recorded: 2019-05-08
Pages: 4
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Measurement System, Substrate Processing System, and Device Manufacturing Method