Patent Assignment
Reel/Frame 049123/0785
Assignment of Assignor's Interest
Recorded: 2019-05-09
Pages: 6
Assignors
HUNSCHE, STEFAN
Executed: 2015-03-23
JANG, CHIOU-HUNG
Executed: 2015-06-30
JOCHEMSEN, MARINUS
Executed: 2015-04-22
TOMASELLO, VITO
Executed: 2015-03-23
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Focus-Dose Co-Optimization Based on Overlapping Process Window