Patent Assignment
Reel/Frame 049123/0839
Assignment of Assignor's Interest
Recorded: 2019-05-09
Pages: 3
Assignors
CHEONG, LIN LEE
Executed: 2015-11-20
HUANG, WENJIN
Executed: 2015-11-20
LA FONTAINE, BRUNO
Executed: 2015-11-23
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods for Determining an Approximate Value of a Processing Parameter at Which a Characteristic of the Patterning Process Has a Target Value