Patent Assignment
Reel/Frame 049124/0433
Assignment of Assignor's Interest
Recorded: 2019-05-09
Pages: 9
Assignors
HULSEBOS, EDO MARIA
Executed: 2015-10-12
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2015-10-09
BRINKHOF, RALPH
Executed: 2015-10-23
HERES, PIETER JACOB
Executed: 2015-10-23
LUCAS, JORN KJELD
Executed: 2015-10-09
VERHEES, LOEK JOHANNES PETRUS
Executed: 2015-10-19
VAN DONKELAAR, INGRID MARGARETHA ARDINA
Executed: 2015-10-23
BIJNEN, FRANCISCUS GODEFRIDUS CASPER
Executed: 2015-10-13
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Controlling a Lithographic Apparatus and Device Manufacturing Method, Control System for a Lithographic Apparatus and Lithographic Apparatus