Patent Assignment
Reel/Frame 049144/0991
Assignment of Assignor's Interest
Recorded: 2019-05-10
Pages: 5
Assignors
WANG, JIA-HENG
Executed: 2019-04-12
WU, I-WEN
Executed: 2019-04-12
LEE, CHEN-MING
Executed: 2019-04-12
YANG, FU-KAI
Executed: 2019-04-12
WANG, MEI-YUN
Executed: 2019-04-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Methods of Forming Epitaxial Source/Drain Features in Semiconductor Devices