Patent Assignment
Reel/Frame 049162/0083
Assignment of Assignor's Interest
Recorded: 2019-05-13
Pages: 6
Assignors
SHIMAI, MOTOYUKI
Executed: 2019-02-21
HAYASHI, TOYOHIDE
Executed: 2019-01-09
HATANO, AKITO
Executed: 2019-01-08
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Device Including Heater Between Substrate and Spin Base