Patent Assignment
Reel/Frame 049172/0894
Assignment of Assignor's Interest
Recorded: 2019-05-14
Pages: 6
Assignors
MORIYA, RUMIKO
Executed: 2019-04-25
BANSE, TAKANORI
Executed: 2019-05-09
SATO, SUGURU
Executed: 2019-05-09
AKIDUKI, YUUJI
Executed: 2019-05-09
TANIKAWA, TAKEHIRO
Executed: 2019-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Driving Member and Processing Apparatus