Patent Assignment
Reel/Frame 049215/0048
Assignment of Assignor's Interest
Recorded: 2019-05-17
Pages: 5
Assignors
FUNK, MERRITT
Executed: 2019-05-01
RANJAN, ALOK
Executed: 2019-05-06
LANE, BARTON
Executed: 2019-05-01
VENTZEK, PETER
Executed: 2019-05-03
MOSES, JUSTIN
Executed: 2019-05-02
DUBOSE, CHELSEA
Executed: 2019-05-02
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods and Systems for Focus Ring Thickness Determinations and Feedback Control