Patent Assignment
Reel/Frame 049241/0513
Assignment of Assignor's Interest
Recorded: 2019-05-21
Pages: 6
Assignors
SATO, JUN
Executed: 2019-05-10
MIURA, SHIGEHIRO
Executed: 2019-05-16
CHIBA, TAKASHI
Executed: 2019-05-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Dry Cleaning a Susceptor and Substrate Processing Apparatus