Patent Assignment
Reel/Frame 049268/0104
Assignment of Assignor's Interest
Recorded: 2019-05-23
Pages: 3
Assignors
TERASAWA, TSUNEO
Executed: 2019-05-10
FUKUDA, HIROSHI
Executed: 2019-05-10
IWAI, DAISUKE
Executed: 2019-05-10
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, 100-0004, JAPAN
Covered Property
(1)
Defect Classification Method, Method of Sorting Photomask Blanks, and Method of Manufacturing Mask Blank