Patent Assignment
Reel/Frame 049271/0527
Assignment of Assignor's Interest
Recorded: 2019-05-23
Pages: 3
Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
SCHLEISSHEIMER STRASSE 90,, GARCHING, 85748, GERMANY
Covered Property
(1)
Holding Apparatus and Method for Holding a Substrate