Patent Assignment
Reel/Frame 049316/0716
Assignment of Assignor's Interest
Recorded: 2019-05-30
Pages: 8
Assignors
YOSHIDA, YUKIFUMI
Executed: 2019-05-15
OKUTANI, MANABU
Executed: 2019-05-15
YASUDA, SHUICHI
Executed: 2019-05-15
KANEMATSU, YASUNORI
Executed: 2019-05-15
UEDA, DAI
Executed: 2019-05-16
ZHANG, SONG
Executed: 2019-05-15
NAGAHARA, TATSURO
Executed: 2019-05-13
KINUTA, TAKAFUMI
Executed: 2019-05-13
Assignees
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
MERCK PATENT GMBH
FRANKFURTER STRASSE 250, DARMSTADT, GERMANY
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus