Patent Assignment
Reel/Frame 049344/0349
Assignment of Assignor's Interest
Recorded: 2019-06-03
Pages: 8
Assignors
YU, ZHIRU
Executed: 2019-04-16
PENG, DANPING
Executed: 2019-04-16
LEI, JUNJIANG
Executed: 2019-04-16
FANG, YUAN
Executed: 2019-04-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Lithographic Mask Correction Using Volume Correction Techniques