Patent Assignment
Reel/Frame 049350/0134
Assignment of Assignor's Interest
Recorded: 2019-06-03
Pages: 3
Assignors
SOWA, MARK
Executed: 2015-01-15
KANE, ROBERT
Executed: 2015-01-15
SERSHEN, MICHAEL
Executed: 2015-01-16
Assignee
ULTRATECH, INC.
3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Plasma Enhanced ALD System
Application:
16/429,850 →
Publication:
US 2019/0284689
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.