Patent Assignment
Reel/Frame 049355/0786
Assignment of Assignor's Interest
Recorded: 2019-06-04
Pages: 5
Assignors
LAI, WEI-CHIH
Executed: 2018-11-07
CHANG, HAN-LUNG
Executed: 2019-04-23
LIU, BO-TSUN
Executed: 2019-04-23
CHEN, LI-JUI
Executed: 2019-04-23
CHENG, PO-CHUNG
Executed: 2019-04-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Droplet Generator and Method of Servicing Extreme Ultraviolet Imaging Tool