Patent Assignment
Reel/Frame 049358/0705
Assignment of Assignor's Interest
Recorded: 2019-06-04
Pages: 4
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Transfer Apparatus, Substrate Processing Apparatus Including the Same, and Substrate Misalignment Compensation Method