Patent Assignment
Reel/Frame 049359/0495
Assignment of Assignor's Interest
Recorded: 2019-06-04
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Coating Film Forming Apparatus and Adjustment Method Therefor