Patent Assignment
Reel/Frame 049376/0993
Assignment of Assignor's Interest
Recorded: 2019-06-05
Pages: 5
Assignor
KATO, HITOSHI
Executed: 2019-06-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus