Patent Assignment
Reel/Frame 049380/0193
Assignment of Assignor's Interest
Recorded: 2019-06-05
Pages: 3
Assignors
YOKOTA, AKIHIRO
Executed: 2019-05-27
MOYAMA, KAZUKI
Executed: 2019-05-27
MARUYAMA, KOJI
Executed: 2019-05-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Temperature Control Method