Patent Assignment
Reel/Frame 049403/0280
Assignment of Assignor's Interest
Recorded: 2019-06-06
Pages: 3
Assignor
TONARI, KAZUHIKO
Executed: 2019-04-19
Assignee
ULVAC, INC.
2500 HAGISONO, CHIGASAKI-SHI, KANAGAWA, 2538543, JAPAN
Covered Property
(1)
Deposition Apparatus and Deposition Method