Patent Assignment
Reel/Frame 049451/0892
Assignment of Assignor's Interest
Recorded: 2019-06-12
Pages: 4
Assignors
SUN, CHE-YUAN
Executed: 2019-05-28
CHEN, YEN-LIANG
Executed: 2019-05-28
FAN, HE
Executed: 2019-05-28
CHEN, YEN-HUNG
Executed: 2019-05-28
LIN, KAI
Executed: 2019-05-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method for Forming Semiconductor Structure and Overlay Error Estimation