Patent Assignment
Reel/Frame 049457/0109
Assignment of Assignor's Interest
Recorded: 2019-06-13
Pages: 3
Assignors
HUNG, TSUNGYU
Executed: 2019-05-24
TSAI, PANG-YEN
Executed: 2019-05-24
LEE, PEI-WEI
Executed: 2019-05-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Self-Aligned Inner Spacer on Gate-All-Around Structure and Methods of Forming the Same