Patent Assignment
Reel/Frame 049460/0866
Assignment of Assignor's Interest
Recorded: 2019-06-13
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Vacuum Processing Apparatus, Vacuum Processing System and Vacuum Processing Method