Patent Assignment
Reel/Frame 049471/0438
Assignment of Assignor's Interest
Recorded: 2019-06-14
Pages: 4
Assignors
HU, WEI-SHAN
Executed: 2019-05-15
GUI, DONG
Executed: 2019-05-13
LEE, JANG JUNG
Executed: 2019-05-13
LI, CHE-LIANG
Executed: 2019-05-13
HOU, DUEN-HUEI
Executed: 2019-05-13
LIU, WEN-CHUNG
Executed: 2019-05-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Line Edge Roughness Analysis Using Atomic Force Microscopy