Patent Assignment
Reel/Frame 049491/0327
Assignment of Assignor's Interest
Recorded: 2019-06-17
Pages: 4
Assignors
KIKUCHI, YUKI
Executed: 2019-06-17
WADA, TOSHIHARU
Executed: 2019-06-17
MAEKAWA, KAORU
Executed: 2019-06-17
KO, AKITERU
Executed: 2019-06-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Patterning Low-K Materials Using Thermal Decomposition Materials