Patent Assignment
Reel/Frame 049501/0228
Assignment of Assignor's Interest
Recorded: 2019-06-18
Pages: 8
Assignors
KO, AKITERU
Executed: 2019-03-19
OKUBO, KAZUYA
Executed: 2019-03-19
TOSHIMA, HIROYUKI
Executed: 2019-06-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods to Reshape Spacer Profiles in Self-Aligned Multiple Patterning