Patent Assignment
Reel/Frame 049515/0265
Assignment of Assignor's Interest
Recorded: 2019-06-19
Pages: 4
Assignors
GOORDEN, SEBASTIANUS ADRIANUS
Executed: 2016-12-22
PANDEY, NITESH
Executed: 2016-12-23
AKBULUT, DUYGU
Executed: 2016-12-22
POLO, ALESSANDRO
Executed: 2016-12-22
HUISMAN, SIMON REINALD
Executed: 2016-12-22
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices