Patent Assignment
Reel/Frame 049600/0899
Assignment of Assignor's Interest
Recorded: 2019-06-26
Pages: 5
Assignors
HIRATA, TOSHIHARU
Executed: 2019-06-20
KATADA, YOSUKE
Executed: 2019-06-14
MATSUHASHI, TAKAFUMI
Executed: 2019-06-18
TAKANO, KUNIO
Executed: 2019-06-19
NAKAJIMA, KOUICHI
Executed: 2019-06-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Method, and Control Program