Patent Assignment
Reel/Frame 049621/0770
Assignment of Assignor's Interest
Recorded: 2019-06-27
Pages: 3
Assignors
CHEN, HUAN-CHIEH
Executed: 2019-06-01
WANG, CHAO-CHUN
Executed: 2019-06-11
WU, CHIH-YU
Executed: 2019-06-13
KOAI, KEITH KUANG-KUO
Executed: 2019-06-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Chemical Vapor Deposition Apparatus and Blocker Plate