Patent Assignment
Reel/Frame 049659/0393
Assignment of Assignor's Interest
Recorded: 2019-06-28
Pages: 3
Assignors
MATSUHASHI, TAKAFUMI
Executed: 2019-06-24
TAKANO, KUNIO
Executed: 2019-06-24
HIRATA, TOSHIHARU
Executed: 2019-06-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Substrate Transfer Method