Patent Assignment
Reel/Frame 049676/0942
Assignment of Assignor's Interest
Recorded: 2019-07-05
Pages: 7
Assignors
SATO, TATSUHIKO
Executed: 2019-06-18
SHINOHARA, TSUTOMU
Executed: 2019-06-18
NAKATA, TOMOHIRO
Executed: 2019-06-18
MIURA, TAKERU
Executed: 2019-06-18
Assignee
FUJIKIN INCORPORATED
3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-SHI, OSAKA, 550-0012, JAPAN
Covered Property
(1)
Valve Device, Fluid Control System, Fluid Control Method, Semiconductor Manufacturing System, and Semiconductor Manufacturing Method