Patent Assignment
Reel/Frame 049695/0291
Assignment of Assignor's Interest
Recorded: 2019-07-09
Pages: 4
Assignors
TSUDA, SHOTARO
Executed: 2019-06-18
HIRAOKA, NOBUYASU
Executed: 2019-06-18
OKITA, NOBUAKI
Executed: 2019-06-18
NISHIDA, TAKAYUKI
Executed: 2019-06-24
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method